Apparatus for detecting extraneous substances on a glass plate

Details Apparatus for detecting extraneous substances on a glass plate Apparatus for detecting extraneous substances on a glass plate

1991-12-27

1993-09-14

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356239, 356338, 356369, 250572, 250563, G01N 2100, G01J 400

Patent

active

052454037

ABSTRACT:
An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation angle, a second light projecting system arranged above the surface thereof which is irradiated with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface irradiated with the laser beams respectively emitted from the first and the second light projecting system at an elevation angle smaller than the first elevation angle. The light receiving system is arranged on a side opposite to the direction of irradiation with the normal line set up at the laser beam irradiation point therebetween and the output level of the P-polarized laser beam is set in specific relation to the S-polarized laser beam.

REFERENCES:
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patent: 4610541 (1986-09-01), Tanimoto et al.
patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4669875 (1987-06-01), Shiba et al.
patent: 4672196 (1987-06-01), Canino
patent: 4893932 (1990-01-01), Knollenberg
patent: 4914309 (1990-04-01), Masaharu et al.
patent: 4999510 (1991-03-01), Hayano et al.

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