Apparatus for detecting displacement

Details Apparatus for detecting displacement Apparatus for detecting displacement

2008-01-15

2008-01-15

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07319526

ABSTRACT:
A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device unit (140) has a first diffraction scale (141) and a second diffraction scale (143). The first diffraction scale (141) has a transmission type first diffraction grating (142). The second diffraction scale (143) has a diffraction grating. The second diffraction scale (143) has a transmission type second diffraction grating (144) on both sides of a metal film (146). Furthermore, the metal film (146) configures a reflection type third diffraction grating (145) when the second diffraction scale (143) is viewed from the side of the main scale (110).

REFERENCES:
patent: 5214280 (1993-05-01), Rieder et al.
patent: 5696373 (1997-12-01), Fukui et al.
patent: 0 672 891 (1995-09-01), None
patent: 06194190 (1994-07-01), None
patent: A 2002-372407 (2002-12-01), None

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