Apparatus for detecting defect in circuit pattern and defect...

Details Apparatus for detecting defect in circuit pattern and defect... Apparatus for detecting defect in circuit pattern and defect...

2006-10-31

2006-10-31

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S646000

Reexamination Certificate

active

07129719

ABSTRACT:
Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.

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