Apparatus for detecting defect by examining electric...

Details Apparatus for detecting defect by examining electric... Apparatus for detecting defect by examining electric...

2011-04-26

2011-04-26

Nguyen, Vinh P (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750030, C324S750050

Reexamination Certificate

active

07932733

ABSTRACT:
An exemplary apparatus for detecting defect is capable of measuring temperature characteristics of a semiconductor sample without restrictions in the movement range of a sample stage and a probe device by a temperature control device. A heater heats a sample stage, and the sample stage is cooled by a refrigerant contained in a refrigerant container through a heat transfer line connected to the sample stage, a first heat receiving portion connected to the heat transfer line, a second heat receiving portion that is detachable from the heat receiving portion, a heat transfer line connected to the heat receiving portion, and a heat transfer rod connected to the heat transfer line, thereby adjusting the temperature of a semiconductor sample held by the sample stage. The heat receiving portions are separated from each other to release the restriction of the sample stage and a probe device such that the sample stage and the, probe device can be moved in a sample chamber.

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Japanese Office Action, issued in Japanese Patent Application No. 2008-035242, dated Jun. 15, 2008.

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