Apparatus for detecting correct positioning of a wafer cassette

Details Apparatus for detecting correct positioning of a wafer cassette Apparatus for detecting correct positioning of a wafer cassette

1998-05-06

2000-05-09

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055949, 25055933, 356375, 414937, G01N 2186

Patent

active

060607211

ABSTRACT:
A mechanical indicator assembly mounted on a cassette stage in a semiconductor processing system is mechanically actuated when a wafer carrying cassette is correctly positioned onto the stage. The indicator assembly includes a pin engaged by the cassette which moves a lever mounted reflector to a position indicating that the cassette is correctly positioned. An electro-optical assembly disposed entirely outside a housing surrounding the stage, directs a light beam toward the reflector, and senses reflected light indicative of correct positioning of the cassette on the stage.

REFERENCES:
patent: 4778382 (1988-10-01), Sakashita
patent: 5857827 (1999-01-01), Asakawa et al.

Affiliated with

Also associated with

Rating

Apparatus for detecting correct positioning of a wafer cassette does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for detecting correct positioning of a wafer cassette, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for detecting correct positioning of a wafer cassette will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1067345