Apparatus for detecting an in-focus position of a substrate surf

Details Apparatus for detecting an in-focus position of a substrate surf Apparatus for detecting an in-focus position of a substrate surf

1995-03-13

1996-01-09

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

250548, 2502014, 356387, G01N 2186

Patent

active

054830796

ABSTRACT:
A position detecting apparatus detects a matching state of a position of a surface of a light-transmissive object with respect to a fiducial object plane of an objective optical system. Light transmitted through one-half of a pupil plane of the objective optical system is reflected by a front surface of the object through an opposite half of the pupil plane to a photoelectric detector. Light reflected from a rear surface of the object through the opposite half of the pupil plane is intercepted and prevented from reaching the detector.

REFERENCES:
patent: 3721827 (1973-03-01), Reinheimer
patent: 4620089 (1986-10-01), Schlichting et al.
patent: 4798948 (1989-01-01), Neumann et al.
patent: 5317142 (1994-05-01), Noda et al.

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