Apparatus for detecting an array of wafers

Details Apparatus for detecting an array of wafers Apparatus for detecting an array of wafers

1989-03-29

1990-09-04

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

414331, G01N 2186

Patent

active

049547216

ABSTRACT:
An apparatus for detecting an array of wafers comprises a reference information generator for generating reference information from the reference condition in which wafers are partly inserted correctly in all grooves formed in side plates of a first wafer carrier, a window setting device for setting wafer-detecting windows at those positions where the wafers are arranged on a second wafer carrier, in accordance with the reference information supplied from said reference information generator, a photosensor for detecting the wafers arranged on the second wafer carrier and generating information representing the presence of the wafers on the second wafer carrier, a signal generator for generating signals from the information generated by the photosensor, and a position detector for collating the signals supplied from the signal generator with said wafer detecting windows, to detect the shape of that portion of any signal that corresponds to a wafer window, and to determine the position of the wafer from the shape of said portion of the signal.

REFERENCES:
patent: 4803373 (1989-02-01), Imamura et al.
patent: 4892455 (1990-01-01), Hine

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