Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing gas sample
Patent
1996-04-30
1998-06-02
Stucker, Jeffrey
Chemical apparatus and process disinfecting, deodorizing, preser
Analyzer, structured indicator, or manipulative laboratory...
Means for analyzing gas sample
422 83, 422 98, 422 90, G01N 2700
Patent
active
057594937
ABSTRACT:
A gas sensor for detecting the presence of a specified gas within a mixture includes a silicon substrate, a silicon nitride membrane supported by the substrate, a thin gold sensor trace deposited on the membrane, and a thin gold reference trace deposited on the membrane. A molybdenum adhesion layer is employed between the membrane and the gold traces. The electrical resistance of the sensor trace changes when the sensor trace adsorbs molecules of the gas. Solid state construction facilitates quick and efficient regeneration of the sensing capability of the gas sensor. The silicon nitride membrane and the molybdenum adhesion layer do not adversely affect the resistivity of the gold traces. An alternate gas sensor embodiment includes an integrally formed heater element.
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Read et al. "Mechanical Behavior of Aluminum and Copper Thin Films" Mechanics and Materials for Electronic Packaging American Society of Mechanical Engineers, Applied Mechanics Division, AMD vol. 187(1994), ASME, New York, NY, USA, pp. 41-49. Abstract Only.
Arizona Instrument Corporation
Gresham Lowell W.
Meschkow Jordan M.
Stucker Jeffrey
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