Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2007-11-07
2009-12-29
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
Reexamination Certificate
active
07639370
ABSTRACT:
Embodiments of an apparatus for deriving an iso-dense bias are generally described herein. Other embodiments may be described and claimed.
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Bischoff Joerg
Weichert Heiko
Akanbi Isiaka O
Chowdhury Tarifur R.
Madriaga Manuel B.
Tokyo Electron Limited
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