Apparatus for depositing epitaxial semiconductor from the liquid

Details Apparatus for depositing epitaxial semiconductor from the liquid Apparatus for depositing epitaxial semiconductor from the liquid

1978-07-19

1979-07-03

Kimlin, Edward C.

Coating apparatus

Immersion or work-confined pool type

Capillary passages or barometric column feed

118412, 148171, 148172, B05C 300, B05C 302

Patent

active

041596943

ABSTRACT:
A furnace boat has a plurality of wells therein. A first slide movably extends through the boat along and across the bottom of the wells. The first slide carries a substrate on which layers of semiconductor material are to be deposited. A second slide movable extends through the boat and across the wells adjacent the open tops of the wells. The second slide supports the starter deposition materials. A wafer extends partially across each well adjacent each slide, and an inclined guide plate extends partially across each well from adjacent the second slide to an edge of the wafer. Molten deposition material is deposited from the second slide onto the inclined guide plate and rolls into an end of the space between the wafer and the substrate carried on the first slide. The deposition material is then sucked into the space between the wafer and substrate by capillary action. Upon cooling the furnace boat, the semiconductor material will deposit from the deposition material onto the substrate. The first slide can be moved to carry the substrate into each well where a separate epitaxial layer can be deposited on the substrate.

REFERENCES:
patent: 3664294 (1972-05-01), Solomon
patent: 3692592 (1972-09-01), Marinelli
patent: 3747562 (1973-07-01), Stone et al.
patent: 3753801 (1973-08-01), Lockwood et al.
patent: 3755011 (1973-08-01), Kleinknecht et al.
patent: 3765959 (1973-10-01), Unno et al.
patent: 3933538 (1976-01-01), Akai et al.
patent: 3997377 (1976-12-01), Izawa et al.
patent: 4032370 (1977-06-01), Matare
patent: 4033291 (1977-07-01), Naito et al.
patent: 4063972 (1977-12-01), Akai et al.

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