Apparatus for depositing diamond coating in reactor equipped wit

Details Apparatus for depositing diamond coating in reactor equipped wit Apparatus for depositing diamond coating in reactor equipped wit

1995-10-04

1996-10-22

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118728, 118729, 20429807, C23C 1600

Patent

active

055672426

ABSTRACT:
A method and apparatus for coating components such as cutting tools with diamond using a microwave plasma excited gas mixture in a reactor equipped with a bowl-shaped substrate table having a concave inner surface for supporting the components to be coated. The plasma forms a plasma ball during the coating operation and the geometrical shape, configuration and position of the table is adapted to stabilize the plasma and control the shape and position of the plasma in such a way that the outer surface of the plasma conforms substantially to the surfaces of the components to be coated. The table can include a system of channels for optimized gas flow and metallic or ceramic wires or rods to control the shape and position of the plasma as well as yield additional excitation of the gas mixture. The table can include an upper rim which facilitates coupling of the plasma directly to the table. The table can include ledges, rods, compartments and/or holes for supporting the components to be coated.

REFERENCES:
patent: 4707384 (1987-11-01), Schachner et al.
patent: 4804431 (1989-02-01), Ribner
patent: 4869924 (1989-09-01), Ito
patent: 4943345 (1990-07-01), Asmussen et al.
patent: 5023068 (1991-06-01), Jones
patent: 5169676 (1992-12-01), Moran et al.
patent: 5175019 (1992-12-01), Purdes et al.
patent: 5190590 (1993-03-01), Suzuki et al.
patent: 5236511 (1993-08-01), Etzkorn et al.
patent: 5271971 (1993-12-01), Herb et al.
patent: 5324361 (1994-06-01), Etzkorn et al.
patent: 5334350 (1994-08-01), Mikami et al.
patent: 5395452 (1995-03-01), Kobayashi et al.
patent: 5468297 (1995-11-01), Letort
Bunshah, R. F. Deposition Technologies for Films and Coatings, Noyes Publications 1982, p. 20.

Affiliated with

Also associated with

Rating

Apparatus for depositing diamond coating in reactor equipped wit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for depositing diamond coating in reactor equipped wit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for depositing diamond coating in reactor equipped wit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2355514