Apparatus for depositing a material on a substrate by chemical v

Details Apparatus for depositing a material on a substrate by chemical v Apparatus for depositing a material on a substrate by chemical v

1992-11-04

1994-06-07

Bueker, Richard

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of coating supply or source outside of primary...

427577, 427585, 4272481, 427249, 118715, 118723HC, 118724, C23C 1600

Patent

active

053188098

ABSTRACT:
Apparatus for the deposition of a material such as diamond on a substrate by chemical vapor deposition is provided. The apparatus comprises:

REFERENCES:
patent: 4953499 (1990-09-01), Anthony
patent: 4970986 (1990-11-01), Anthony
patent: 5007373 (1991-04-01), Legg
patent: 5160544 (1992-11-01), Garg

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