Apparatus for delivering a silica film forming solution

Details Apparatus for delivering a silica film forming solution Apparatus for delivering a silica film forming solution

1994-09-27

1997-02-04

Czaja, Donald E.

Coating apparatus

Projection or spray type

Rotating turret work support

118688, 118320, 437228, 437231, B05C 500

Patent

active

055993940

ABSTRACT:
A dispensing apparatus for delivering a silica coating solution in a fixed quantity from a liquid container to a surface of a substrate to form a silica film thereon. The liquid container storing the silica coating solution is connected to a diaphragm pump through a suction pipe. The diaphragm pump is connected to a nozzle through a delivery pipe. The coating solution in the liquid container is supplied to the nozzle by sucking and delivering action of the diaphragm pump. The coating solution is discharged from the nozzle to a surface of a substrate supported by a spin chuck of a spin coating apparatus.

REFERENCES:
patent: 4649856 (1987-03-01), Shannon et al.
patent: 5134962 (1992-08-01), Amada et al.

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