Apparatus for cutting up hard and brittle material

Stone working – Sawing – Reciprocating

Patent

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Details

51 64, B28D 102

Patent

active

041050126

ABSTRACT:
A gang saw is used for cutting up hard and brittle material, particularly semiconductor material, in which saw there is a reciprocating movement of workpiece with a large amplitude and low frequency and an additional vibrating motion of the sawblades in the same direction with a low amplitude and high frequency permitting very thin wafers of large area and a plane cutting surface to be prepared.

REFERENCES:
patent: 2024860 (1935-12-01), Hobart
patent: 2312014 (1943-02-01), Wallace
patent: 2963018 (1960-12-01), Mattson
patent: 2998676 (1961-09-01), Hawkins
patent: 3326071 (1967-06-01), Bushman
patent: 3626921 (1971-12-01), Lane
patent: 3637190 (1972-01-01), Isaacson
patent: 3674004 (1972-07-01), Grandia
patent: 3678918 (1972-07-01), Stauffer
patent: 3760289 (1973-09-01), Egleme

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