Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent
1991-08-28
1997-02-04
Breneman, R. Bruce
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
C30B 3500
Patent
active
055993907
ABSTRACT:
A lock valve disposed between a pulling pot and a lock chamber is opened at the start of the pulling process and thereby uncovers a lock entrance for the crystal that is to be pulled, and together with a gasket closes the lock entrance after the end of the pulling process and thereby hermetically separates the pulling pot from the lock chamber. The gasket (9) is protected during the pulling of the crystal by a guard (15, 16) against the thermal radiation of the hot crystal.
REFERENCES:
patent: 3511610 (1970-05-01), Dohmen
Leybold Application 45-100.2, "Crystal Growing"; May 2, 1989.
Breneman R. Bruce
Garrett Felisa
Leybold Aktiengesellschaft
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