Apparatus for crucible-free zone processing of a semiconductor r

Details Apparatus for crucible-free zone processing of a semiconductor r Apparatus for crucible-free zone processing of a semiconductor r

1975-07-16

1977-07-12

Goldberg, E. A.

Electric heating

Metal heating

Of cylinders

219 1043, H05B 502

Patent

active

040356000

ABSTRACT:
An apparatus for a floating zone melt processing of a semiconductor rod including a heating circuit comprised of an annular induction heating coil adapted to annularly encompass a zone of the semiconductor rod and upon activation to produce an annular melt zone on such rod, a plurality of ceramic capacitors positioned within a fluid-impermeable housing filled with a low viscosity dielectric cooling fluid, such as a transformer oil, and connected in parallel with the heating coil and hollow electric current conduits coupling the heating coil and the capacitors to the output circuit of a high frequency generator and to a hydraulic heat-exchange circuit.

REFERENCES:
patent: 2159826 (1939-05-01), Thacker
patent: 3219892 (1965-11-01), Wurster
patent: 3271551 (1966-09-01), Keller
patent: 3827017 (1974-07-01), Keller
Birks, "Modern Dilectric Material", Heywood & Co., London, 1960, p. 165.

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