Apparatus for crucible-free floating-zone melting a semiconducto

Details Apparatus for crucible-free floating-zone melting a semiconducto Apparatus for crucible-free floating-zone melting a semiconducto

1983-08-08

1986-04-01

Bernstein, Hiram H.

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

219 1075, H05B 636, C30B 1320

Patent

active

045797196

ABSTRACT:
Apparatus for crucible-free zone melting an end-supported semiconductor rod, including an RF generator having a resonant circuit for determining the generator frequency, the resonant circuit having connected therein a tank-circuit coil and a tank-circuit capacitor, and an induction heating coil fed by the RF generator and annularly surrounding the semiconductor rod, the tank-circuit coil being formed as a primary winding to the induction heating coil acting as a secondary winding, both the tank circuit coil and the induction heating coil forming a structural unit having a fixed magnetic coupling.

REFERENCES:
patent: 3644151 (1972-02-01), Keller
patent: 3827017 (1974-07-01), Keller
patent: 3985947 (1976-10-01), Keller
patent: 4017701 (1977-04-01), Mittelmann
patent: 4220839 (1980-09-01), DeLeon

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