Optical waveguides – With optical coupler – Movable coupler
Patent
1993-02-24
1995-09-05
Mintel, William
Optical waveguides
With optical coupler
Movable coupler
385 75, 385 76, 385 90, 385137, G02B 638, G02B 636
Patent
active
054486629
ABSTRACT:
Optical metrology apparatus, specifically a laser probe (1), includes a frame (10) comprised of a material selected to have a predetermined coefficient of thermal expansion. A beamsplitter (36) is coupled to the frame for generating a sample beam optical path (D) and a reference beam optical path (C). The beamsplitter is optically coupled to an optical fiber (12) that delivers radiation to and conveys radiation from the frame. A piezoelectric stack (48) has an excitation signal coupled thereto and includes a mirror (26) for phase modulating the reference beam optical path length in response to the excitation signal. The laser probe includes a first strain gauge (58) that is coupled to the piezoelectric stack and a second strain gauge (60) that is coupled to the frame. A closed loop control system (A1, A2, A3, A4, VR) varies the excitation signal in accordance with the detected strains so as to maintain the reference beam optical path length in a predetermined relationship to a path length of the sample beam optical path. This athermalizes the probe, in that any expansion or contraction of the frame is matched by the piezoelectric stack, yielding a net zero change in the non-common beam path lengths. The apparatus includes an optical fiber support (14) that is rotatably coupled to the frame for positioning the optical fiber at a desired angular position.
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patent: 5095517 (1992-03-01), Monguzzi et al.
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patent: 5147348 (1992-09-01), Leckrone et al.
patent: 5239366 (1993-08-01), Kittell et al.
patent: 5293438 (1994-03-01), Konno et al.
DeGroot Peter J.
Hayes Guy H.
Kittell David H.
Denson-Low W. K.
Hughes Aircraft Company
Mintel William
Schubert W. C.
Tran Minhloan
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