Apparatus for conveying gases to and from a chamber

Details Apparatus for conveying gases to and from a chamber Apparatus for conveying gases to and from a chamber

2004-09-24

2008-11-04

Hepperle, Stephen M (Department: 3753)

Fluid handling

Systems

Multiple inlet with multiple outlet

C137S599030, C137S599110, C118S715000

Reexamination Certificate

active

07445023

ABSTRACT:
Apparatus comprising: a chamber having a chamber inlet and a chamber outlet; a first inlet for receiving a first gas stream; a second inlet for receiving a second gas stream; a first outlet for outputting the first gas stream to a first vacuum pump; a second outlet for outputting the second gas stream to a second vacuum pump; a conduit network for connecting the first inlet to the first outlet and for connecting the second inlet to the second outlet such that, for each gas stream, first and second flow paths are defined between its respective inlet and outlet, the first flow path passing through the chamber inlet and the chamber outlet, and the second flow path by-passing the chamber, and means for routing the gas streams through the network such that when one gas stream flows along its first flow path, the other gas stream flows along its second flow path.

REFERENCES:
patent: 5250323 (1993-10-01), Miyazaki
patent: 6016611 (2000-01-01), White et al.
patent: 6263587 (2001-07-01), Raaijmakers et al.
patent: 6461436 (2002-10-01), Campbell et al.
patent: 0 651 432 (1995-05-01), None
patent: 0 671 484 (1995-09-01), None
patent: 0 959 149 (1999-11-01), None
patent: WO 03/033762 (2003-04-01), None
patent: WO 03/087429 (2003-10-01), None
United Kingdom Search Report of Application No. GB 0322602.4; Date of search: Jan. 20, 2004.
PCT International Search Report of International Application No. PCT/GB2004/004121; Date of mailing of the International Search Report: May 24, 2005.
PCT Written Opinion of the International Searching Authority of International Application No. PCT/GB2004/004121; Date of mailing: May 24, 2005.

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