Apparatus for conveying and processing a wafer in a physically c

Details Apparatus for conveying and processing a wafer in a physically c Apparatus for conveying and processing a wafer in a physically c

1996-02-13

1998-05-05

Leung, Philip H.

Electric heating

Inductive heating

With workpiece support

219635, 219653, 414222, 414937, 414938, 414940, 118719, H05B 610

Patent

active

057477809

ABSTRACT:
At the front side of a wafer cassette fitted to a wafer feeding unit of a magnetic levitation wafer conveying device, a wafer stopper for preventing the wafer waiting in the wafer cassette from popping out is provided. The wafer supplied from the magnetic levitation conveying device is supplied into the reaction chamber by magnetic force, and is directly held in the reaction chamber by this magnetic force. Since the wafer stopper is positioned between the wafer cassette fitted in the wafer feeding unit and the starting end of the wafer conveying route, the wafer waiting in the wafer cassette next to the wafer to be conveyed is prevented from popping out together with the wafer to be conveyed. Moreover, the wafer conveyed by the magnetic force can be directly held in the reaction chamber in heated state.

REFERENCES:
patent: 3363081 (1968-01-01), Noiret
patent: 4531037 (1985-07-01), Camus
patent: 5377596 (1995-01-01), Ono et al.
patent: 5417537 (1995-05-01), Miller
patent: 5443346 (1995-08-01), Murata et al.

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