Apparatus for controlling Z-position of probe

Details Apparatus for controlling Z-position of probe Apparatus for controlling Z-position of probe

2010-03-18

2010-10-19

Noland, Thomas P (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Roughness or hardness

C073S001810

Reexamination Certificate

active

07814775

ABSTRACT:
Apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.

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patent: 2006/0033024 (2006-02-01), Sparks et al.

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