Apparatus for controlling uniformity of polished material

Details Apparatus for controlling uniformity of polished material Apparatus for controlling uniformity of polished material

1999-01-25

2000-07-25

Rose, Robert A.

Abrading

Machine

Rotary tool

451 41, B24B 722

Patent

active

060930896

ABSTRACT:
An apparatus for controlling a uniformity of a polished material is described. An air bag comprises a plurality of tubular rings. An air-bag manifold controller is connected to the tubular rings. The air-bag manifold controller controls inflation and deflation of the tubular rings in order to draw up the polished material and control pressure difference between different areas of the polished material.

REFERENCES:
patent: 4897966 (1990-02-01), Takahashi
patent: 4918869 (1990-04-01), Kitta
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5916016 (1999-06-01), Bothra
patent: 5975998 (1999-11-01), Olmstead

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