Apparatus for controlling the pressure in a process chamber...

Details Apparatus for controlling the pressure in a process chamber... Apparatus for controlling the pressure in a process chamber...

2003-06-20

2010-10-19

Rivell, John (Department: 3753)

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

C137S014000, C137S565230, C137S565300, C417S028000, C417S053000, C417S201000, C417S205000

Reexamination Certificate

active

07814922

ABSTRACT:
A method of operating apparatus for controlling the pressure in a process chamber (10), the apparatus comprising a first pump unit (14) having an inlet in fluid connection with an outlet of said process chamber, and a second pump unit (16) having an inlet in fluid connection with an outlet of the first pump unit via a flow control unit (18) comprising a variable flow control device (20; 28) having variable conductance for controlling outlet fluid pressure at the outlet of the first pump unit, the method comprises controlling speed of the first pump unit to increase the range of chamber pressures over which control of the outlet fluid pressure produces changes in said chamber pressure without exceeding the thermal limit and/or motor stall limit of the first pump unit.

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Gebrauchanweisung zu der Turbomolekularpumpe TURBO.DRIVE S, der Firma Leybold Vakuum, veröffentlicht, Nov. 2001, p. 21 w/translation.
Gebrauchanweisung zu der Turbomolekularpumpe TURBOVAC TW 300, TW 300 H, der Firma Leybold Vakuum, veröffentlicht, Mar. 2002, p. 21 w/translation.
Gebrauchanweisung zu der Turbomolekularpumpe TURBOVAC TW 701, der Firma Leybold Vakuum, veröffentlicht, Jun. 2003, p. 13 w/translation.

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