Apparatus for controlling the distribution of evaporated materia

Details Apparatus for controlling the distribution of evaporated materia Apparatus for controlling the distribution of evaporated materia

1987-12-14

1989-05-30

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

118715, 118724, 118726, C23C 1400

Patent

active

048340219

ABSTRACT:
An evaporated material distribution controller includes specially configured portions having shaped edges to maintain the ratio of the thickest and thinnest portions of the layer of material deposited onto a surface within a ratio between 1.5:1.00 and 1.00:1.00.

REFERENCES:
patent: 3904503 (1975-09-01), Hanfmann
patent: 4131753 (1978-12-01), Tsujimoto
patent: 4222345 (1980-09-01), Bergfelt
patent: 4380212 (1983-04-01), Kraus
patent: 4543910 (1985-10-01), Dobrowolski
Maissel et al., Handbook of Thin Film Tech., McGraw Hill, N.Y. .COPYRGT. 1970, pp. 1-64 and 1-65.

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