Apparatus for controlling supply amount of photoresist

Details Apparatus for controlling supply amount of photoresist Apparatus for controlling supply amount of photoresist

1995-10-31

1998-06-02

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Including valve means in flow line

Reciprocating

2395854, 2395851, 239583, 25112918, F16K 3106

Patent

active

057588309

ABSTRACT:
A photoresist supply amount controller is disclosed including: a connection pipe into which solution comes; a nozzle portion connected to one end of the connection pipe, the nozzle portion being hollow therein and made of electrically conductive material, the nozzle portion having a nozzle ball at its bottom; a core member installed to be raised or lowered in the nozzle portion, the core member being inserted in a tight contact with the inner circumference of the nozzle portion in order to selectively open and close the nozzle ball, the core member being made of electrically conductive material; a cylindrical electronic coil coupled to the outer circumference of the nozzle portion; a grip installed to penetrate the top center of the nozzle portion and having a spiral on its outer circumference.

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