Apparatus for controlling an infinitesimal flow rate of fluid

Details Apparatus for controlling an infinitesimal flow rate of fluid Apparatus for controlling an infinitesimal flow rate of fluid

1985-01-23

1987-06-02

Metz, Andrew H.

Liquid purification or separation

With program actuator

2101982, B01D 2130

Patent

active

046701389

ABSTRACT:
Apparatus for controlling an infinitesimal flow rate of fluid comprises at least one filter means (3, 3A, 3B, 3C, 3D, . . . ) provided in a fluid passage and capable of setting to a predetermined filtration amount, thereby regulating the flow rate of the fluid by controlling fluid supply to said filter means. The present apparatus may be used in a vacuum processing system.

REFERENCES:
patent: 3121681 (1964-02-01), Baxter
patent: 3491512 (1970-01-01), Timmins et al.
patent: 4083661 (1978-04-01), McPherson et al.
patent: 4226714 (1980-10-01), Furness et al.
patent: 4422942 (1983-12-01), Allington
patent: 4448692 (1984-05-01), Nakamoto et al.

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