Apparatus for contouring a semiconductor, light responsive array

Details Apparatus for contouring a semiconductor, light responsive array Apparatus for contouring a semiconductor, light responsive array

1992-01-27

1993-10-12

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257698, 257783, H01L 3902

Patent

active

052528502

ABSTRACT:
Large area semiconductor wafers such as CCDs typically have a non-flat profile. A vacuum chuck is used to generate a vacuum under the chip to reduce the curvature to conform to the flat profile of the substrate surface through which the vacuum is generated. Other than flat final profiles are useful also.

REFERENCES:
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patent: 4942454 (1990-07-01), Mori et al.
patent: 4962416 (1990-10-01), Jones et al.
patent: 4975765 (1990-12-01), Ackermann et al.
patent: 5072289 (1991-12-01), Sugimoto et al.
patent: 5172301 (1992-12-01), Schneider

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