Apparatus for continuously forming a large area deposited film b

Details Apparatus for continuously forming a large area deposited film b Apparatus for continuously forming a large area deposited film b

1994-03-31

1999-11-02

Padgett, Marianne

Coating apparatus

Gas or vapor deposition

Running length work

118723MA, 118729, 118730, 427571, 427575, C23C 1400, C23C 1600, H05H 102, H05H 130

Patent

active

059762578

ABSTRACT:
A method and apparatus for forming a large area functional deposited film on the surface of a continuously moving web member by means of a microwave plasma CVD process, characterized in that at the exterior face of the circumferential wall comprising a curved continuously moving web member of the microwave plasma CVD film-forming chamber, a member having a function of transporting the web member while pressing it and being provided with a mechanism capable of controlling the temperature of the web member is disposed.

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