Apparatus for continuously depositing a layer of a solid materia

Details Apparatus for continuously depositing a layer of a solid materia Apparatus for continuously depositing a layer of a solid materia

1981-02-18

1982-09-28

Smith, John D.

Coating apparatus

Gas or vapor deposition

Running length work

118729, 118 61, 239422, B05B 700, C23C 1310

Patent

active

043512674

ABSTRACT:
By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600.degree. C. which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two lateral curtains being constituted by another naturally gaseous reactant or reactant diluted in a gas. The gaseous products of the reaction issuing from the nozzle are compelled to flow above a predetermined region of the substrate and these products are evacuated by suction by means of channels disposed at the extremities of this region of the substrate and a pump to which the channels are connected.

REFERENCES:
patent: 3689304 (1972-09-01), Bamford
patent: 3814327 (1974-06-01), Dada
patent: 3951100 (1976-04-01), Sopko et al.

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