Abrading – Accessory – Dressing
Patent
1997-05-12
1999-03-23
Morgan, Eileen P.
Abrading
Accessory
Dressing
451 56, 451444, 451324, B24B 2900
Patent
active
058851470
ABSTRACT:
A flexible conditioning apparatus and method for uniformly conditioning a polishing surface of a pad used to remove undesirable irregularities from a silicon wafer and to achieve a planar condition of the polishing pad. In a preferred embodiment of the present invention, a roughening member comprising a plurality of point contacts, such as diamond particles, is adapted for movement into and out of engagement with the surface of the pad. A flexible member supporting the roughening member allows the roughening member to conform to the surface of the pad to achieve uniform polishing of the pad.
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Kreager Douglas P.
Lee Junedong
Integrated Process Equipment Corp.
Morgan Eileen P.
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