Apparatus for compensating corrosion effects in integrated semic

Details Apparatus for compensating corrosion effects in integrated semic Apparatus for compensating corrosion effects in integrated semic

1982-08-23

1986-04-15

Niebling, John F.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

357 52, 357 67, 357 68, 204196, H01L 2704

Patent

active

045831092

ABSTRACT:
Apparatus for compensating corrosion effects due to highly mobile positive ions in insulating oxides of integrated semiconductor circuits, including a ring being disposed on the surface of a semiconductor circuit and being connected to a negative voltage, the ring being formed of a material resistant to corrosion due to positive ions during the operation of semiconductor circuits.

REFERENCES:
patent: 3573571 (1971-04-01), Brown
patent: 3602782 (1971-08-01), Klein
patent: 3611071 (1971-10-01), Agusta
patent: 3811076 (1974-05-01), Smith
patent: 3961358 (1976-06-01), Polinsky
patent: 4063274 (1977-12-01), Dingwall
patent: 4122483 (1978-10-01), Hulstrunk
patent: 4219827 (1980-08-01), Kaiser

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