Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier
Patent
1995-12-06
1997-02-18
Warden, Jill
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Waste gas purifier
422198, 110236, 431 7, 431328, F01N 310
Patent
active
056039050
ABSTRACT:
The disposal of troublesome substances, especially global-warming halogenated compounds is difficult enough, but is particularly difficult when associated with particulate-forming matter, such as silane and arsine commonly encountered in waste gas streams of the semiconductor industry. The combustive destruction of the troublesome substances in such a waste gas stream is simply and successfully achieved by injecting the stream admixed with fuel gas into a combustion zone surrounded by the radiant surface of a foraminous gas burner that is separately fed fuel gas and excess air sufficient to burn all the combustibles entering the combustion zone. A simple apparatus integrates the combustion zone with a quenching zone for the combustion product stream.
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patent: 4206711 (1980-06-01), Konrad
patent: 4801437 (1989-01-01), Konagaya et al.
patent: 4828481 (1989-05-01), Weil et al.
patent: 5211552 (1993-05-01), Krill et al.
Bartz David
Kendall Robert M.
Moreno Frederick E.
Alzeta Corporation
Garbo Paul W.
Tran Hien
Warden Jill
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