Apparatus for collection of particulate matter from an ambient g

Details Apparatus for collection of particulate matter from an ambient g Apparatus for collection of particulate matter from an ambient g

1987-03-13

1988-02-16

Nozick, Bernard

Gas separation

With nonliquid cleaning means for separating media

Solid agent cleaning member movingly contacts apparatus

7386322, B01D 5330

Patent

active

047252944

ABSTRACT:
An apparatus for collecting particulate matter from a test atmosphere including a chamber having internal walls and posts which support an unpatterned ultra-clear wafer. A gas inlet tube penetrates the chamber with a central gas passageway for directing a stream of high velocity gas onto the wafer. Particles from the stream of gas are collected across most of the surface of the wafer by impaction and by deposition due to enhanced diffusion provided by a vacuum environment.

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patent: 3711707 (1973-01-01), Lilienfeld et al.
patent: 3970428 (1976-07-01), Barringer
patent: 4321822 (1982-03-01), Marple et al.
patent: 4378159 (1983-03-01), Galbraith

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