Apparatus for coating semiconductive material

Details Apparatus for coating semiconductive material Apparatus for coating semiconductive material

1981-01-05

1984-12-25

Childs, S. L.

Coating apparatus

With means to apply electrical and/or radiant energy to work...

118621, 118626, 118636, 118638, 361229, B05B 502, B05C 500

Patent

active

044896727

ABSTRACT:
Excessive heat-generating current levels produced in semiconductive materials by electrostatically assisted coating apparatus employed to, for example, improve the uniformity of a coating applied to such materials are avoided by passing an auxiliary current through said semiconductive materials in the same region and in a direction opposite to that of the current produced by said electrostatically assisted coating apparatus such that the difference between the said current produced by said electrostatically assisted coating apparatus and the said auxiliary current is less than or equal to a predetermined value.

REFERENCES:
patent: 2774921 (1956-12-01), Walkup
patent: 3196270 (1965-07-01), Rosenthal
patent: 3474292 (1969-10-01), Carter
patent: 3484275 (1969-12-01), Lewicki
patent: 3671806 (1972-06-01), Whitmore et al.
patent: 3702258 (1972-11-01), Gibbons et al.
patent: 3729648 (1973-04-01), Kerr
patent: 4086872 (1978-05-01), Pan
patent: 4088093 (1978-05-01), Pan
"Controlling Polar Charge with Low Electrical Potentials", Andrews et al., Research Disclosure, Feb., 1980.

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