Apparatus for coating materials in a vacuum chamber

Details Apparatus for coating materials in a vacuum chamber Apparatus for coating materials in a vacuum chamber

1990-08-10

1992-06-16

Beck, Shrive

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118724, 118726, 118730, 414172, 4272481, 427251, 4272555, C23C 1644

Patent

active

051217074

ABSTRACT:
An aluminium vacuum deposition machine for coating parts of lead frames, having a vacuum chamber containing the lead frames and aluminium to be vaporized. To reduce the incidence of imperfections in the aluminium coatings, a meissner trap is positioned within the vacuum chamber itself rather than or in addition to a meissner trap adjacent to a diffusion pump. Also, to reduce the thermal mass within the chamber, a support jig for the lead frames comprises a pair of end rings and a bracer member joining the end rings and holding them apart. Two pairs of spaced rollers are arranged in the chamber so that each ring rests on a respective pair of rollers, and the rollers are driven so that the support jig is rotated during vacuum deposition.

REFERENCES:
patent: 3962082 (1976-06-01), Hundal
patent: 4116161 (1978-09-01), Steube
patent: 4138306 (1979-02-01), Niwa
patent: 4704301 (1987-11-01), Bauer et al.
patent: 5010035 (1991-04-01), Bunshah et al.

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