Apparatus for coating a web on a rotating drum by plasma assiste

Details Apparatus for coating a web on a rotating drum by plasma assiste Apparatus for coating a web on a rotating drum by plasma assiste

1996-10-28

1999-11-30

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429807, 20429808, 20429819, 20429826, 20429811, 118718, 118723VE, 118723MP, 118726, C23C 1434, C23C 1600

Patent

active

059936223

ABSTRACT:
A crucible (4) in a vacuum chamber (3) holds material to be evaporated, such as a metal or metal oxide or a mixture of a metal and a metal oxide, and a coating roll (6) guides a film web (8) a certain distance away from the material to be evaporated. A chamber (9, 10) is provided on each side of the coating roll (6) which carries the film web (8) past the crucible (4), a magnetron cathode (11, 12) connected to a medium-frequency source (19) being provided in each chamber. Each of the two chambers (9, 10) is connected by its own channel (13, 14) to a coating zone (20) directly between the coating roll (6) and the crucible (4), and each chamber (9, 10) is connected by a pressure line (21, 22) to a source (23, 24) of process gas.

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patent: 5286531 (1994-02-01), Krugg et al.
patent: 5302208 (1994-04-01), Grimm et al.
patent: 5399252 (1995-03-01), Scherer et al.
patent: 5415757 (1995-05-01), Szczyrbowski et al.

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