Apparatus for coating a surface with a metal utilizing a plasma

Details Apparatus for coating a surface with a metal utilizing a plasma Apparatus for coating a surface with a metal utilizing a plasma

1989-12-11

1991-05-07

Bueker, Richard

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 38, 427 39, 118723, 118 501, C23C 1600

Patent

active

050135783

ABSTRACT:
An apparatus and method for coating or layering a surface with a metal utilizing a metal vapor vacuum arc plasma source. The apparatus includes a trigger mechanism for actuating the metal vacuum vapor arc plasma source in a pulsed mode at a predetermined rate. The surface or substrate to be coated or layered is supported in position with the plasma source in a vacuum chamber. The surface is electrically biased for a selected period of time during the pulsed mode of operation of the plasma source. Both the pulsing of the metal vapor vacuum arc plasma source and the electrical biasing of the surface are synchronized for selected periods of time.

REFERENCES:
patent: 4714860 (1987-12-01), Brown et al.
patent: 4764394 (1988-08-01), Conrad
patent: 4785220 (1959-11-01), Brown

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