Apparatus for coating a substrate

Details Apparatus for coating a substrate Apparatus for coating a substrate

1990-05-25

1992-06-16

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Moving the base

427166, 427424, 118718, C23C 1600

Patent

active

051223945

ABSTRACT:
A coating applicator is provided for depositing a film on a surface of glass or other substrates by chemical-vapor deposition. The applicator includes a pair of opposing coating nozzles for applying a vaporized coating-chemical reactant in a carrier gas to the surface at such a concentration and velocity that coating of the surface is achieved under substantially reaction-rate-controlled conditions. Each coating nozzle is positioned adjacent the surface with a small clearance therebetween, the clearance being open to the outside atmospehre. The opposing coating nozzles are directed toward each other at a selected angle with respect to the surface of the substrate. The angle and the clearance provide a condition where there is substantially no intermixing of coating vapors with the outside atmosphere.

REFERENCES:
patent: 3293074 (1966-12-01), Nickl
patent: 3876410 (1975-04-01), Scholes
patent: 4351267 (1982-09-01), Kalbstopf et al.
patent: 4574733 (1986-03-01), Nath et al.
patent: 4584206 (1986-04-01), Sleighter
patent: 4612217 (1986-09-01), Gordon

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