Apparatus for coating a substrate

Details Apparatus for coating a substrate Apparatus for coating a substrate

1996-07-29

1997-11-18

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429821, 20429819, 20429816, 20429817, 20429818, 20429809, 20429826, 20429828, 20429812, C23C 1435

Patent

active

056883889

ABSTRACT:
Pole shoes (3, 4, 5) of magnetically conductive material are provided inside of a first tubular target (2). Outside the target (2), a magnetic flux guide element (7) is provided, which has three pole shoes (8, 9, 10) directed toward the hollow body (1), which are connected to each other by magnets (12, 13). These magnets (12, 13) transmit the magnetic field through the target (2) to the pole shoes (3, 4, 5) inside the target (2) across narrow gaps (6, 11).

REFERENCES:
patent: 3616402 (1971-10-01), Kuagai
patent: 4166018 (1979-08-01), Chapin
patent: 4356073 (1982-10-01), McKelvey
patent: 4957605 (1990-09-01), Hurwitt et al.
patent: 5158660 (1992-10-01), Devigne et al.

Affiliated with

Also associated with

Rating

Apparatus for coating a substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for coating a substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for coating a substrate will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1562909