Apparatus for cleaning wafers and discs

Details Apparatus for cleaning wafers and discs Apparatus for cleaning wafers and discs

1997-03-31

1999-02-16

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Wiping

15 971, 1523016, 152441, B08B 104, B08B 1100

Patent

active

058707921

ABSTRACT:
An apparatus for cleaning workpieces such as magnetic recording discs, optical discs, and semiconductor wafers includes a sponge-like material surrounded on two sides by substantially rigid plates that serve as an exoskeleton support for the sponge-like material. The plates include a number of apertures formed therein. The sponge-like material protrudes through the apertures of the plates, allowing the sponge-like material to contract a surface of the workpiece during the cleaning process.

REFERENCES:
patent: 1809907 (1931-06-01), Newcomb
patent: 1861347 (1932-05-01), Johnson
patent: 2186050 (1940-01-01), Vaughn
patent: 3128487 (1964-04-01), Vallis
patent: 3368230 (1968-02-01), Kramer
patent: 4403367 (1983-09-01), Brown et al.
patent: 4998314 (1991-03-01), Borofsky
patent: 5144711 (1992-09-01), Gill, Jr.
patent: 5311634 (1994-05-01), Andros

Affiliated with

Also associated with

Rating

Apparatus for cleaning wafers and discs does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for cleaning wafers and discs, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for cleaning wafers and discs will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2054487