Apparatus for cleaning thin, fragile wafers of a material

Brushing – scrubbing – and general cleaning – Machines – Brushing

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

15 70, 15 74, 51112, A46B 1304

Patent

active

039395146

ABSTRACT:
Apparatus is disclosed by which a number of thin, disc-like wafers are moved in a linear path and fed into such path on a discrete basis from a supply or feeding station. The individual or discrete wafers are moved into engagement with a pair of endless belts which, in effect, define the linear path and are arranged one over the other with the facing portions of the belts being spaced apart by at least the diameter of the wafers to be interposed therebetween. As the wafers are moved through the linear path by the belts, they are moved between pairs of brushes, each of a pair being rotatably mounted on a respective side of the path for engaging and cleaning the surfaces of the wafer, the pairs of brushes extending in the direction of movement of the wafers. The belts and the brushes are coupled to drive means such that the rotary forces applied to the surfaces of the wafers by each pair of brushes is nullified to the extent that rotation of the wafers in one direction and movement along the path by the belts is not inhibited.

REFERENCES:
patent: 949381 (1910-02-01), Polk
patent: 3311940 (1967-04-01), Spittler

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus for cleaning thin, fragile wafers of a material does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for cleaning thin, fragile wafers of a material, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for cleaning thin, fragile wafers of a material will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2072964

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.