Apparatus for cleaning slices of material

Brushing – scrubbing – and general cleaning – Machines – Brushing

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Details

15 77, 15102, 51 88, 134 6, A46B 1302, B08B 700

Patent

active

040245969

ABSTRACT:
Both sides of thin slices of material are cleaned simultaneously in the apparatus of this invention. A slice of material rotates about its axis as it passes between opposed rotatable cleaning surfaces. The apparatus includes a stop which maintains the slice of material off-center with respect to the cleaning surfaces. The apparatus is particularly useful for cleaning slices of semiconductor material.

REFERENCES:
patent: 1261688 (1918-04-01), Bratherton
patent: 2311481 (1943-02-01), Sinclair
patent: 2980935 (1961-04-01), Bogard et al.
patent: 3150401 (1964-09-01), Taylor et al.
patent: 3473181 (1969-10-01), Leonard
patent: 3585668 (1971-06-01), Jaccodine et al.
patent: 3748677 (1973-07-01), Frank et al.
patent: 3970471 (1976-07-01), Bankes et al.

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