Apparatus for cleaning glass masks

Details Apparatus for cleaning glass masks Apparatus for cleaning glass masks

1983-10-03

1986-02-18

Roberts, Edward L.

Brushing, scrubbing, and general cleaning

Machines

Wiping

15 21C, 15102, 414225, B08B 1102

Patent

active

045702799

ABSTRACT:
An apparatus for cleaning glass masks used for the manufacture of semiconductor devices, which apparatus comprises a pair of rotary cleaning elements confronting each other and adapted to pour liquid therebetween, structure for supporting a cassette in which a plurality of glass masks to be cleaned are contained, and carriage structure by which the glass masks in the cassette are, one by one, pinched, carried to, and held in a position between the cleaning elments, in which position both surfaces of the glass mask are wiped by the cleaning elements and washed by the liquid poured from the cleaning elements.

REFERENCES:
patent: 3098249 (1963-07-01), Tice et al.
patent: 3213472 (1965-10-01), Cocchiaraley et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3939514 (1976-02-01), Cook
patent: 4062463 (1977-12-01), Hillman et al.
patent: 4109337 (1978-08-01), Hillman et al.
patent: 4138755 (1979-02-01), Hashimoto

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