Apparatus for cleaning both sides of substrate

Details Apparatus for cleaning both sides of substrate Apparatus for cleaning both sides of substrate

1998-08-17

2000-09-12

Coe, Philip R.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 881, 134144, 134153, 134902, B08B 704

Patent

active

061158674

ABSTRACT:
An apparatus for cleaning both sides of a substrate, incorporating a spin chuck for holding a substrate such that contact with at least a central portion of the substrate is prevented, a motor having a hollow shaft connected to the spin chuck to transmit rotating force to the spin chuck, a front-side cleaning mechanism for cleaning a surface of the substrate held by the spin chuck, and a back-side cleaning mechanism for rinsing a back side of the substrate held by the spin chuck, wherein the back-side cleaning mechanism is disposed to face the back side of the substrate held by the spin chuck through hollow portions of the hollow shaft.

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Patent Abstract of Japan, JP Publication No. 10-112453 dated Apr. 28, 1998.

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