Apparatus for cleaning and testing precision components of hard

Cleaning and liquid contact with solids – Processes – Using solid work treating agents

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134 2, 134 7, 134 10, 134 11, 134 21, 134 40, 134 72, 134902, 451 38, 451 39, 451 40, 451 78, 451 89, B08B 600

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active

059893559

ABSTRACT:
Apparatus for cleaning, assembling, testing and inspecting contamination sensitive hardware. The apparatus includes an environmental process enclosure having an inner processing chamber, and a carbon dioxide jet spray cleaning system. The enclosure includes a loadlock pass-through having front and rear access doors for providing access to the inner processing chamber. A blower is disposed in the enclosure for circulating purified gas therethrough. A prefilter disposed prior to an inlet of the blower, and a high purity filter and laminar flow screen are disposed in the inner processing chamber. A heater is provided for heating the purified gas and a temperature controller is coupled to the heater for controlling the temperature of the purified gas. A table is disposed in the inner processing chamber upon which contamination sensitive hardware and testing and assembly apparatus may be placed. The carbon dioxide jet spray cleaning system includes a carbon dioxide delivery system for storing liquid carbon dioxide, and a valve assembly coupled to the carbon dioxide tank that is disposed in the inner processing chamber. The valve assembly is coupled to a nozzle and orifice assembly, which produces a spray of gas and solid carbon dioxide that is used to clean the contamination sensitive hardware.

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