Apparatus for cleaning and drying workpieces

Details Apparatus for cleaning and drying workpieces Apparatus for cleaning and drying workpieces

1991-01-04

1992-09-01

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134 1, 134 992, 134105, 134107, 134186, 134902, B08B 312

Patent

active

051431033

ABSTRACT:
An apparatus for cleaning and drying workpieces which comprises a closable chamber, means for introducing a cleaning solvent to the chamber, means for removing the solvent from the chamber, means for introducing an inert gas to the chamber, means for receiving workpieces and for moving the workpieces with respect to the level of the solvent, and means for transmitting megasonic energy with respect to the solvent.

REFERENCES:
patent: 3638666 (1972-02-01), Fishman
patent: 3702795 (1972-11-01), Wessells et al.
patent: 3727620 (1973-04-01), Orr
patent: 3893869 (1975-07-01), Mayer et al.
patent: 4118649 (1978-10-01), Shwartzman et al.
patent: 4132567 (1979-01-01), Blackwood
patent: 4543130 (1985-09-01), Shwartzman
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4854337 (1989-08-01), Bunkenburg et al.
patent: 4871417 (1989-10-01), Nishizawa et al.

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