Apparatus for cleaning and drying hard disk substrates

Details Apparatus for cleaning and drying hard disk substrates Apparatus for cleaning and drying hard disk substrates

1997-08-27

1999-03-02

Chin, Randall E.

Brushing, scrubbing, and general cleaning

Machines

Wiping

15 882, B08B 1102

Patent

active

058755055

ABSTRACT:
A substrate cleaning station includes a first index table supporting thereon at least three circumferentially spaced first substrate carriers on which hard disk substrates are mounted respectively. A substrate drying station includes a second index table disposed rearward of the first index table and supporting thereon at least three circumferentially spaced second substrate carriers on which cleaned hard disk substrate are mounted, respectively. Upon rotation of the first index table, each of the first substrate carriers moves successively through a substrate mounting position, a substrate cleaning position and a substrate removing position. Likewise, upon rotation of the second index table, each of the second substrate carriers moves through a substrate mounting position, a substrate drying position and a substrate removing position.

REFERENCES:
patent: 5092011 (1992-03-01), Gommori et al.

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