Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Soap making
Patent
1990-10-02
1992-09-08
Warden, Robert J.
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Soap making
4221863, 422186, 134 1, 359509, B08B 700
Patent
active
051456494
ABSTRACT:
A method and apparatus for removing unclear matter on an optical element used with a radiation beam is disclosed. A filter is used to introduce light of a desired wavelength into a chamber in which the optical element is accommodated; a gas supplying device is used to supply a reactive gas which is reactable with the unclear matter on the surface of the optical element; and a vacuum-evacuating device is used to vacuum-evacuate the inside of the chamber.
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Patent Abstracts of Japan, vol. 9, No. 283 for Japanese Patent Document No. 60-129136 (Jul. 10, 1985), Nov. 9, 1985.
Patent Abstracts of Japan, vol. 9, No. 125 for Japanese Patent Document No. 60-12128 (Jan. 22, 1985), May 30, 1985.
Koide, et al., "Resuscitation of carbon-contaminated mirrors and gratings by oxygen-discharge cleaning," Applied Optics, vol. 26, No. 18, pp. 3884-3894, Sep. 15, 1987.
Fukuda Yasuaki
Hayashida Masami
Iizuka Takashi
Niibe Masahito
Canon Kabushiki Kaisha
Trembley T. A.
Warden Robert J.
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