Apparatus for cleaning a wafer surface

Dispensing – Plural sources – compartment – containers and/or spaced jacket – With discharge assistant for each source

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Details

2221445, 2221465, 222252, 222394, 239307, B67D 552

Patent

active

053702743

ABSTRACT:
A cleaning apparatus for cleaning with a mixture of various chemicals. The cleaning apparatus includes a compressor for compressing and transferring a solution medium, at least one jet pipe, one end of which is connected to the compressor and the other end of which is open, and a plurality of suction pipes, connected to the jet pipe at a specified interval, respectively. The apparatus further includes a plurality of chemical tanks with an open end of the suction pipe being inserted into each of the chemical tanks, respectively. The invention permits a number of objects to be cleaned sequentially without being contaminated by making use of the principal of aspiration. In addition, the compressor is used only to pass the solution medium therethrough inside of the compressor and is never corroded by the mixture of chemicals.

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patent: 4029260 (1977-06-01), Herrick
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patent: 4691850 (1987-09-01), Kirschmann
patent: 5074438 (1991-12-01), Ingram
patent: 5259557 (1993-11-01), Spriggs et al.

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