Apparatus for cleaning a glass substrate

Details Apparatus for cleaning a glass substrate Apparatus for cleaning a glass substrate

1998-12-30

1999-08-10

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Scraping

15102, 451388, B08B 104

Patent

active

059339012

ABSTRACT:
A squeegee unit is driven to rotate about a rotation axis perpendicular to a glass substrate surface with a motor while a plurality of blades of the squeegee unit contact on the substrate surface. The rotating squeegee unit is moved in a predetermined path on the substrate surface by relatively moving an X-Y stage so that its blades remove foreign materials adhered to the glass substrate surface.

REFERENCES:
patent: 1740006 (1929-12-01), Crowley
patent: 5020180 (1991-06-01), Mimura
patent: 5551986 (1996-09-01), Jain

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